Combined-information processing apparatus, method for processing combined-information, program, and recording medium

摘要

In order to solve the conventional problem in which the occurrence of abnormal behaviors in a manufacturing apparatus cannot be properly determined in view of the variations in measured data caused by adjustment made to the manufacturing apparatuses, the combined-information processing apparatus comprises: an inspectional equation storage unit (103) for storing an inspectional equation calculating one or more principal component scores, the inspectional equation being obtained by performing a principal component analysis on measured data on a plurality of measuring objects in terms of two or more correlated measurement items, and the measuring objects being processed by the manufacturing apparatus whose adjustable conditions are changed while the manufacturing apparatus is in a normal state; an inspected measured-data acceptance unit (104) for accepting inspected measured data on the measuring objects processed by the manufacturing apparatus in terms of the measurement items corresponding to each term contained in the inspectional equation; a principal-component-score calculation unit (105) for calculating principal component scores using the inspected measured data with the inspectional equation; an inspecting unit (106) for inspecting the manufacturing apparatus using the calculated principal component scores; and an output unit (107) for outputting the inspecting results.