| 摘要 |
<p>An interference measuring apparatus (1) that measures a distance to a surface to be inspected (3a) is provided, and includes a light dividing unit (13) configured to divide each of the plurality of light fluxes into light to be inspected and reference light; an objective lens (24) through which the light to be inspected is transmitted; a photoelectric conversion element (11,12) configured to receive interference light between the light to be inspected and the reference light for each of the plurality of light fluxes and output an interference signal obtained by converting the interference light into an electrical signal; and a calculation unit (8) configured to calculate the distance based on a phase obtained by subtracting a defocused wavefront from a phase component of complex amplitude at the pupil position of the objective lens (24) for each of the plurality of light fluxes by using the interference signal.</p> |
