METHOD OF MANUFACTURING NANO STRUCTURE AND METHOD OF FORMING A PATTERN USING IT

摘要

Provided is a method for manufacturing a nanostructure. The method for manufacturing a nanostructure according to an embodiment of the present invention comprises the steps of forming a first thin film comprising a first block copolymer on a substrate; forming guide patterns on the first thin film; forming a second thin film including a second block copolymer between the guide patterns; and curing the second thin film, wherein the first block copolymer has a cylindrical shape, and the second block copolymer has a lamellar shape.