Self-imageable film forming polymer, compositions thereof and devices and structures made therefrom

摘要

Embodiments in accordance with the present invention encompass self-imageable film forming compositions that comprise norbornene-type polymers and that can be formulated to be either positive tone imaging or negative tone. The films formed thereby are useful in the forming of microelectronic and optoelectronics devices.

主权项

1. A film forming polymer composition comprising:
a first polymer comprising repeating units derived from one or more monomers selected from: a second polymer blended with said first polymer, said second polymer comprising repeating units derived from a monomer selected from: a casting solvent; and a diazo quinone photo active compound.