| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer direction-changeable substrate transfer device which can transfer a large number of large-area substrates without any risk of damage through freely changing directions. SOLUTION: The transfer direction-changeable substrate transfer device comprises: an upper plate on top of which a substrate to be transferred is to be placed and in which many through-holes are formed; a stationary nozzle which injects air into the through-holes of the upper plate to float the substrate above the upper plate; and a dynamic nozzle which injects air to control the transfer direction of the substrate by adjusting the injection direction of the injected air. COPYRIGHT: (C)2013,JPO&INPIT |
