Inspection method and device

摘要

The high magnification, high resolution and real-time property of an SEM image are realized when the electrical characteristics of an inspection object are measured, without affecting the electrical characteristics of the inspection object. A high-quality, high-magnification first image including an image of a target position in the inspection object on a sample is acquired. Next, a low-quality, low-magnification second image including the image of the target position in the inspection object on the sample and probe images is acquired. Next, data on the first image is built into the second image to generate an image for coarse-access observation which is the same in magnification as the second image. The generation of the image for coarse-access observation is repeated until a probe comes close to the target position in the inspection object.

主权项

1. An inspection method for inspecting electrical characteristics of an inspection object by bringing a probe into contact with a target position in the inspection object on a sample, the method comprising:
a first image acquisition step of acquiring a high-quality, high-magnification first image of the target position in the inspection object on the sample by using a scanning electron microscope; a second image acquisition step of acquiring a low-quality, low-magnification second image of the target position in the inspection object on the sample and the probe by using the scanning electron microscope; a first image reduction step of reducing the first image so as to be the same in magnification as the second image, thereby generating a reduced image; and a coarse-access observation image generation step of synthesizing the reduced image and the second image to generate an image for coarse-access observation comprising the target position included in the reduced image and the probe included in the second image and bein the same in magnification as the second image, wherein the second image acquisition step, the first image reduction step, and the coarse-access observation image generation step are repeated as the probe is moved toward the target position until a determination is made that a distance between the target position in the inspection object and the probe is smaller than a predetermined value in the image for coarse-access observation.