Review apparatus and inspection system

摘要

A review apparatus comprises: means for acquiring a reference image and an optical image by associating the data of the reference image and the data of the optical image with the gradation values defined by a color palette selected from among a plurality of first color palettes; and means for acquiring a comparison image by associating comparison image data that can be acquired from the reference image data and the optical image data with the gradation values defined by a color palette selected from among a plurality of second color palettes. Gradation values for the comparison image data are represented by gradation values for the reference image data and gradation values for the optical image data.

主权项

1. A review apparatus comprising:
a device to acquire a first image and a second image by associating data of the first image and data of the second image with gradation values defined by a one-dimensional color palette selected from among a plurality of one-dimensional first color palettes; and a device to acquire a comparison image by associating comparison image data that can be acquired from the first image data and the second image data with gradation values defined by a two-dimensional color palette selected from among a plurality of two-dimensional second color palettes, wherein the plurality of two-dimensional second color palettes each have gradation values for the first image data along a first axis and gradation values for the second image data along a second axis, and wherein gradation values for the comparison image data are represented by the gradation values for the first image data and the gradation values for the second image data, the gradation values of the first image data being different from the gradation values of the second image data.