Substrate holder positioning method and substrate processing system

摘要

A substrate holder positioning method, capable of positioning a substrate holder without using any positioning jig, includes: measuring a first position of a substrate held on a substrate holder included in a substrate carrying mechanism; carrying the substrate held on the substrate holder to a substrate rotating unit for holding and rotating the substrate; turning the substrate held by the substrate rotating unit through a predetermined angle by the substrate rotating unit; transferring the substrate turned by the substrate rotating unit from the substrate rotating unit to the substrate holder; measuring a second position of the substrate transferred from the substrate rotating unit to the substrate holder; determining the position of the center of rotation of the substrate rotating unit on the basis of the first and the second position; and positioning the substrate holder on the basis of the position of the center of rotation.

主权项

1. A substrate holder positioning method comprising:
a first measuring step of measuring a first edge position of a substrate held on a substrate holder included in a substrate carrying mechanism by position measuring units provided on the substrate carrying mechanism; a carrying step of carrying the substrate held on the substrate holder to a substrate rotating unit for holding and rotating the substrate; a turning step of turning the substrate held by the substrate rotating unit through a predetermined angle by the substrate rotating unit; a transfer step of transferring the substrate turned by the substrate rotating unit from the substrate rotating unit to the substrate holder; a second measuring step of measuring a second edge position of the substrate transferred from the substrate rotating unit to the substrate holder by the position measuring units; a determining step of determining a position of a center of rotation of the substrate rotating unit on the basis of the first edge position and the second edge position; and a positioning step of positioning the substrate holder on the basis of the position of the center of rotation of the substrate rotating unit.