Self-aligned borderless contacts for high density electronic and memory device integration

摘要

A method for fabricating a transistor having self-aligned borderless electrical contacts is disclosed. A gate stack is formed on a silicon region. An off-set spacer is formed surrounding the gate stack. A sacrificial layer that includes a carbon-based film is deposited overlying the silicon region, the gate stack, and the off-set spacer. A pattern is defined in the sacrificial layer to define a contact area for the electrical contact. The pattern exposes at least a portion of the gate stack and source/drain. A dielectric layer is deposited overlying the sacrificial layer that has been patterned and the portion of the gate stack that has been exposed. The sacrificial layer that has been patterned is selectively removed to define the contact area at the height that has been defined. The contact area for the height that has been defined is metalized to form the electrical contact.

主权项

1. A transistor comprising:
a silicon region; a gate stack on the silicon region, the gate stack including a gate oxide layer on the silicon region and a gate electrode on the gate oxide layer, and an off-set spacer surrounding the gate stack; a first patterned sacrificial layer adjacent to a first side of the off-set spacer; a second patterned sacrificial layer adjacent to a second side of the off-set spacer, wherein each of the first and second patterned sacrificial layers substantially contacts a first and second silicided region, respectively, within the silicon region, wherein each of the first and second patterned sacrificial layers extends to the first and second silicided region, respectively, and wherein each of the first and second patterned sacrificial layers is free of contact with at least a top surface of a portion of off-set spacer in contact with the gate stack; and a first contact area and a second contact area defined by the first and second patterned sacrificial layers, respectively, where the each of the first and second contact areas comprises a height dimension defined by a thickness of the first and second patterned sacrificial layers, respectively, and wherein the first and second contact areas are above and extend to the first and second silicided region, respectively.