| 发明名称 | Composite oxide sintered body and sputtering target comprising same | ||
| 摘要 | A composite oxide sintered body includes In, Zn, and Sn, and has a relative density of 90% or more, an average crystal grain size of 10 μm or less, and a bulk resistance of 30 mΩcm or less, the number of tin oxide aggregate particles having a diameter of 10 μm or more being 2.5 or less per mm2 of the composite oxide sintered body. | ||
| 申请公布号 | US8753548(B2) | 申请公布日期 | 2014.06.17 |
| 申请号 | US200913133801 | 申请日期 | 2009.12.07 |
| 申请人 | Idemitsu Kosan Co., Ltd. | 发明人 | Yano Koki;Kawashima Hirokazu |
| 分类号 | H01B1/02 | 主分类号 | H01B1/02 |
| 代理机构 | Millen, White, Zelano & Branigan, P.C. | 代理人 | Millen, White, Zelano & Branigan, P.C. |
| 主权项 | 1. A composite oxide sintered body comprising In, Zn, and Sn, and having a relative density of 90% or more, an average crystal grain size of 10 μm or less, a bulk resistance of 30 mΩcm or less and a nitrogen content of 5 ppm or less, and having a number of tin oxide aggregate particles having a diameter of 10 μm or more being 2.5 or less per mm2. | ||
| 地址 | Tokyo JP | ||