发明名称 Semiconductor device
摘要 A semiconductor device of an embodiment includes: a semiconductor layer made of p-type nitride semiconductor; an oxide layer formed on the semiconductor layer, the oxide layer being made of a crystalline nickel oxide, and the oxide layer having a thickness of 3 nm or less; and a metal layer formed on the oxide layer.
申请公布号 US8754528(B2) 申请公布日期 2014.06.17
申请号 US201313871302 申请日期 2013.04.26
申请人 Kabushiki Kaisha Toshiba 发明人 Saito Shinji;Sugai Maki;Muramoto Eiji;Nunoue Shinya
分类号 H01L33/40 主分类号 H01L33/40
代理机构 Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P. 代理人 Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
主权项 1. A semiconductor device comprising: a p-type nitride semiconductor layer; a metal layer; and an oxide layer formed between the p-type nitride semiconductor layer and the metal layer, the oxide layer being made of a crystalline nickel oxide, and the oxide layer having a thickness of 3 nm or less.
地址 Minato-Ku JP