Coating method

摘要

A coating method for forming a coating film by discharging a coating solution from a coating die onto a surface of a substrate that is being conveyed includes detecting the pressure and flow rate of the coating solution in a circulation circuit through which the coating solution is circulated between the coating die and a supply tank for the coating solution, estimating the viscosity of the coating solution based on the pressure and flow rate detected, determining an initial value of a coating gap between the discharge port of the coating die and the substrate which is necessary to adjust the coating width of the coating die to a target value based on the correlation between the viscosity estimated and the coating width, and adjusting the coating gap to the initial value and starting the supply of the coating solution to the coating die.

主权项

1. A coating method for forming a coating film by discharging a coating solution from a coating die onto a surface of a substrate that is being conveyed, comprising the steps of:
detecting the pressure and flow rate of the coating solution in a circulation circuit through which the coating solution is circulated between the coating die and a supply tank for the coating solution, estimating the viscosity of the coating solution based on the pressure and flow rate detected, determining, based on the correlation between the viscosity estimated and coating width of the coating die, an initial value of a coating gap between the discharge port of the coating die and the substrate which is necessary to adjust the coating width to a target value, adjusting the coating gap to the initial value and starting the supply of the coating solution to the coating die, and changing the flow rate of the coating solution by feedforward control in adjusting the coating gap.