摘要 |
<p>Various embodiments provide a photosensitive siloxane composition containing (a) polysiloxane, (b) a quinone diazide compound, (c) a solvent, and (d) one or more kinds of specified imidosilane compounds. Various embodiments also provide a cured film obtained by applying and/or patterning the photosensitive siloxane composition. Various embodiments further provide a device including the cured film.</p> |