发明名称 LIGHT IRRADIATION APPARATUS
摘要 Provided is a light irradiating device, capable of detecting the changes of illumination distribution to confirm the discharge lamp having experienced bad situations and the determination of the abnormal condition, confirming the normal movement state of the apparatus, and realizing the illumination homogenization according to the changes of the illumination distribution. In the light irradiating device which arranges the light source elements composed of the discharge lamps and reflectors and simultaneously lights the elements, and irradiates the rays from the light source elements to a light irradiating portion in the light irradiating area, a light diffuser plate is arranged for making the light from the light source elements be radicalized for radiation. Further provided is an optical sensor used for detecting the distribution of the light quantity of the spread scattered light reflected by the diffuser plate. The signals detected by the optical sensor are sent to an image processing unit. The image processing unit changes the illumination distribution upon the diffuser plate into the illumination distribution in the light irradiation area to be displayed upon the display portion, and the like. If the illumination of the specified lamp declines, then the lamp with declined illumination is confirmed for outputting alarms, or increasing the power supply for the lamp to compensate the changes of the light quantity distribution.
申请公布号 KR101408516(B1) 申请公布日期 2014.06.17
申请号 KR20110116380 申请日期 2011.11.09
申请人 发明人
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
代理机构 代理人
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