| 摘要 |
<p>Provided in the present invention are a substrate carrying unit and an apparatus having the same. The substrate processing apparatus comprises multiple process chambers which provide a space for processing a substrate; and a carrying chamber which is positioned adjacently to the process chambers and having a substrate carrying unit for carrying the substrate among the process chambers. The substrate carrying unit comprises a base; a movable member which is connected with the base in order to relatively move against the base; a driving member which is placed inside the base and provides driving force for the movable member; and a dust collector which collects dust generated from the driving member. Therefore, the dust collector can easily collect particles generated from a metal wire by having magnetism.</p> |
