MICRO ELECTRO MECHANICAL SYSTEMS DEVICE AND APPARATUS FOR COMPENSATING TREMBLE

摘要

The present invention provides a MEMS device including a fixed substrate; a first driver relatively moved in a first direction with regard to the fixed substrate; a second driver relatively moved in a second direction different from the first direction with regard to the first driver; and an elastic part electrically and physically connecting the fixed substrate and the first driver. The elastic part delivers different voltages to the first driver through a plurality of insulated springs. Therefore, it is advantageous in image stabilization by being moved in the first direction and the second direction with regard to the substrate. Also, the driver can be firmly fixed by using a double folded spring. The number of power supply sources for operation in two direction can be reduced by separating a portion of the double folded spring and applying different voltages.