发明名称 Singulation equipment and singulation method using of optical signal
摘要 PURPOSE: A singulation equipment and singulation method using of an optical signal are provided to increase the durability of a part by applying a noncontact wireless power temporally to perform align and a test process. CONSTITUTION: In a singulation equipment and singulation method using of an optical signal, a light receiving unit(22) receives an alignment optical signal which is generated from a light emitting unit which is installed in semiconductor package(10). A light emitting unit(21) turns on a test optical signal with the light receiving unit. An align controller(23) receives an optical signal and determines an align state. A test controller(25) determines the electrical operation state of the semiconductor package. A power supply unit(30) supplies a temporary power to the semiconductor package for aligning and testing.
申请公布号 KR101407479(B1) 申请公布日期 2014.06.16
申请号 KR20100054885 申请日期 2010.06.10
申请人 发明人
分类号 H01L21/66;H01L21/68;H01L21/683;H01L21/78 主分类号 H01L21/66
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