| 摘要 |
The present invention relates to a target member for accelerating ions or protons and a manufacturing method thereof, wherein the target member has a polymer thin film and a metal nanoparticle layer which are alternately laminated at a regular interval, provides a multi-layered membrane suitable for multi-cascade ion acceleration, increases an amount of ions or protons which are generated through the multi-layered membrane, and increases acceleration energy step by step. For this, the target member for accelerating ions or protons and the manufacturing method thereof according to the present invention are provided, wherein a target for generating ions or protons comprises a polymer thin film with thickness of several nanometers to dozens of nanometers and a metal nano-particle layer with a diameter of several nanometers to dozens of nanometers and the target is a multi-layered membrane in which a polymer thin film and a metal nanoparticle layer are alternately laminated at a regular interval. |
