| 摘要 |
The present invention provides a device and a method for measuring the shape and depth of a hole. The present invention comprises: a light emitting part for irradiating broadband coherent light; an object to be measured having one or more holes and reflecting the light irradiated from the light emitting part on the surface with which the light is irradiated and the bottom surface of the holes; a beam splitter for splitting the light reflected from the object to be measured so as to head the reflected light to first and second paths; a first light detector for measuring the depth of the holes from interference signals by receiving the light reflected from the object to be measured and headed to the first path; and a second light detector for measuring the shape of the holes by receiving the light reflected from the object to be measured and headed to the second path. |
