| 摘要 |
A method for inspecting a substrate treatment apparatus according to the present invention includes a process treatment step of successively performing a first process and a second process on a process substrate in at least one process chamber among process chambers of the substrate treatment apparatus; a step of lowering a corresponding process chamber when the accumulation processing number of a process substrate among the process chambers exceeds a preset number in the process treatment step; and a test step of performing a test process by loading a test substrate to the lowered process chamber. |
