发明名称 PLASMA ANTENNA AND APPARATUS FOR GENERATING PLASMA COMPRISING THE SAME
摘要 The present invention relates to a plasma antenna and an apparatus for generating plasma comprising the same. A plasma antenna according to one embodiment of the present invention includes a first antenna which induces an electric field by using a RF signal; a second antenna which induces an electric field by using the RF signal; and a capacitor which is connected between the input terminal of the first antenna and the input terminal of the second antenna.
申请公布号 KR20140072762(A) 申请公布日期 2014.06.13
申请号 KR20120154646 申请日期 2012.12.27
申请人 SEMES CO., LTD. 发明人 KOO, IL GYO;HARUTYUN MELIKYAN;SEONG, HYO SEONG;LEE, SOO JIN
分类号 H05H1/46;H03H7/40 主分类号 H05H1/46
代理机构 代理人
主权项
地址