发明名称 |
PLASMA ANTENNA AND APPARATUS FOR GENERATING PLASMA COMPRISING THE SAME |
摘要 |
The present invention relates to a plasma antenna and an apparatus for generating plasma comprising the same. A plasma antenna according to one embodiment of the present invention includes a first antenna which induces an electric field by using a RF signal; a second antenna which induces an electric field by using the RF signal; and a capacitor which is connected between the input terminal of the first antenna and the input terminal of the second antenna. |
申请公布号 |
KR20140072762(A) |
申请公布日期 |
2014.06.13 |
申请号 |
KR20120154646 |
申请日期 |
2012.12.27 |
申请人 |
SEMES CO., LTD. |
发明人 |
KOO, IL GYO;HARUTYUN MELIKYAN;SEONG, HYO SEONG;LEE, SOO JIN |
分类号 |
H05H1/46;H03H7/40 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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