发明名称 SYSTEM FOR RAPID THERMAL PROCESS OF SOLAR CELL FILMS
摘要 The present invention relates to a rapid heat treatment system for a thin film of a solar cell. The rapid heat treatment system for the thin film of the solar cell according to the present invention comprises: a chamber for forming a storage space; a casing for forming an enclosed space in which a substrate is arranged; a lamp for heating the substrate; and an injection unit for injecting a reaction gas into the enclosed space.
申请公布号 KR101403288(B1) 申请公布日期 2014.06.13
申请号 KR20120063958 申请日期 2012.06.14
申请人 发明人
分类号 H01L31/042;H01L31/18 主分类号 H01L31/042
代理机构 代理人
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