| 摘要 |
The present invention relates to a chucking member for chucking a substrate in the manufacturing of a semiconductor, a display, and a photovoltaic device. The purpose of the present invention is to enable workers to eliminate the use of a part of multiple chucking members arranged on a large area chuck plate without manually loosening and disassembling each chucking member bolted to the chuck plate. The present invention enables the automation of the assembling and disassembling processes of the chucking members as the chucking members are rotated at a predetermined angle to be disassembled by their own repulsive force and are rotated at a different angle to be automatically assembled by magnetic attraction using a pair of first magnet members installed on a seating part of the chuck plate, on which the chucking members are seated, and a pair of second magnet members installed on the chucking members. |
