摘要 |
<p>A laminated film is provided which exhibits excellent durability even when formed over a surface of a member (in particular, sliding member) to be used under a high pressure of contacted surface of 2.0 GPa or more. The laminated film includes an intermediate layer which contains one or more compounds selected from the group consisting of a carbide, a boride, and a boron carbide compound of a metal element, and which has a hardness measured by a nanoindentation method (hereinafter referred to as a "nanoindentation hardness") of not less than 20 GPa nor more than 35 GPa and a thickness of not less than 5 µm nor more than 10 µm, and a diamond-like carbon film which is formed over the intermediate layer, and which has a nanoindentation hardness of not less than 25 GPa nor more than 35GPa and a thickness of not less than 0.3 µm nor more than 1.0 µm.</p> |