主权项 |
1. A substrate processing apparatus comprising:
first, second and third processing regions; and a sub-transport region, wherein the second processing region is arranged between the first processing region and the third processing region, the first processing region includes a first main transport mechanism that transports a substrate, the second processing region includes a first processing section that performs processing on the substrate and a second main transport mechanism that transports the substrate, the third processing region includes a third main transport mechanism that transports the substrate, the sub-transport region includes a sub-transport mechanism that transports the substrate, the second main transport mechanism is configured to transport the substrate between the first main transport mechanism and the first processing section, and the sub-transport mechanism is configured to transport the substrate from the first main transport mechanism to the third main transport mechanism and to transport the substrate from the third main transport mechanism to the first main transport mechanism.
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