发明名称 |
METHOD AND CONTROL UNIT FOR OPERATING A PLASMA GENERATION APPARATUS |
摘要 |
<p>The invention relates to a method and a control device for operating a plasma generation device. The invention proceeds from a method and a control device, in which a voltage is applied between an anode and a cathode as an ignition voltage for igniting a plasma. In order to allow a gentle operation of the plasma generation device, according to the invention a check is continually performed during the ignition process as to whether the plasma has ignited. In addition, the ignition voltage (UZ) is increased starting from an initial ignition voltage (UZA) and the voltage between the anode and cathode is reduced to a maintenance voltage (UA) after detection of a successful ignition (at time tZ) of the plasma.</p> |
申请公布号 |
CA2888299(A1) |
申请公布日期 |
2014.06.12 |
申请号 |
CA20132888299 |
申请日期 |
2013.11.27 |
申请人 |
OERLIKON METCO AG, WOHLEN |
发明人 |
LIECHTI, FLORIAN;FRIEDERY, ALBERT;KOSCHNITZKE, HARTMUT;GROBER, RENE |
分类号 |
H05H1/36 |
主分类号 |
H05H1/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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