| 摘要 |
PROBLEM TO BE SOLVED: To enable a pattern projection measurement while keeping such convenience of an optical microscope that observation magnification can be freely changed, and limiting enlargement of the microscope to the minimum necessary.SOLUTION: First and second light projection parts 110 are each composed of an optical system having a fixed magnification (for typical example, a double sided telecentric lens). A zoom lens is used in a light receiving part 120, so that the light receiving part 120 can receive light in a wide magnification range. An imaging device 121a is constituted by a monochrome imaging device such as a monochrome CCD (charge-coupled device). The imaging device 121a has such a resolution that, when receiving a projection pattern on a subject S on a stage 140, at least one and preferably a plurality of pixels are included in the minimum pattern width on an observation image at the time of the minimum observation magnification (light receiving magnification). |
