| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate control valve which can control high-temperature fluid, has high frequency durability, and high durability, is excellent in assemblability, maintainability, and manufacturing costs, and can reliably detect opening/closing operation of a valve.SOLUTION: A flow rate control valve 1 is provided with: a body 20 where a valve chamber 20D communicating with an input port 20A and an output port 20B is provided with a valve seat 20C; a valve body 21 which is placed above the valve seat 20C and is in contact with/separate from the valve seat 20C; a rod 41 for moving the valve body 21 up and down; an optical sensor 51 for detecting horizontal movements of the valve body 21; and a reflecting surface 62B. In the flow rate control valve 1, the rod 41 has a piston 44 joined via an elastic member 44A, an intake hole 42D of drive fluid, and an integrally joined spring receiver 32. The reflecting surface interlocks with the movements of the rod 41. |
