发明名称 PHASE CHANGE MEMORY CELLS WITH SURFACTANT LAYERS
摘要 An example embodiment is a phase change memory cell including a bottom electrode and phase change material carried within a via above the bottom electrode. A surfactant layer is deposited above the bottom electrode. The surfactant layer includes a surfactant configured to lower an interfacial force between the phase change material and the via surface.
申请公布号 US2014158971(A1) 申请公布日期 2014.06.12
申请号 US201414180344 申请日期 2014.02.13
申请人 International Business Machines Corporation 发明人 Lam Chung H.;Schrott Alejandro G.
分类号 H01L45/00 主分类号 H01L45/00
代理机构 代理人
主权项 1. A phase change memory cell comprising: a bottom electrode; phase change material carried within a via above the bottom electrode; and a surfactant layer above the bottom electrode, the surfactant layer including a surfactant configured to lower an interfacial force between the phase change material and the via surface.
地址 Armonk NY US