VACUUM HEATING FURNACE AND MANUFACTURING METHOD OF ORGANIC SEMICONDUCTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a vacuum heating furnace capable of efficiently heating and cooling plural substrates.SOLUTION: A vacuum heating furnace A heats plural substrates S in a vacuum. The vacuum heating furnace A includes: a heating space 1 for heating plural substrates S in a vacuum; and a cooling space 2 for cooling the heated plural substrates S in a vacuum. The vacuum heating furnace A includes: a support member 3 capable of holding plural substrates S disposed generally parallel to each other, and moving between the heating space 1 and the cooling space 2 in a direction perpendicular to the surface of the plural substrates S; and a cooling member 4 forming the cooling space 2, which is cooled by a cooling source. The cooling member 4 has a radiation structure 5 for cooling the plural substrates S by means of radiation.