| 摘要 |
PROBLEM TO BE SOLVED: To improve sufficiently the quality of a thin film, while maintaining a work environment.SOLUTION: Each first cooling panel 41 for cooling a substrate W is disposed vertically on the internal surface of a front wall 9 and on the internal surface of a rear wall 11, respectively, and each second cooling panel 53 for cooling the substrate W is disposed vertically between each adjacent substrate area A on the internal surface of a ceiling wall 15. A first heat absorption control plate 77 comprising a porous structure is disposed vertically on the absorption surface 45f side of each first cooling panel body 45, and a second heat absorption control plate 81 comprising a porous structure is disposed vertically on the absorption surface 57f side of each second cooling panel body 57. |
