SUBSTRATE PROCESSING APPARATUS

摘要

A substrate processing apparatus is presented having a transport chamber defining substantially linear substrate transport paths, a linear array of substrate holding modules, each communicably connected to the chamber. The substrate transport has at least one transporter capable of holding and moving the substrate on more than one substantially linear substrate transport paths. The transport chamber having different transport tubes at least one of which is sealable at both ends of the transport tube and configured to hold an isolated atmosphere different from that of the transport tubes, each of the different transport tubes having one of the substrate transport paths located therein different from another of the transport paths located in another of the transport tubes, and being communicably connected to each other, where at least one of the transport tubes is configured to provide uninterrupted transit of the substrate transport through the transport tubes.

主权项

1. A substrate processing apparatus comprising:
a transport chamber, capable of holding an isolated atmosphere isolated from an outside atmosphere, and defining a gross linear substrate transport axis extending longitudinally along the transport chamber between opposing walls of the transport chamber; at least one load lock chamber disposed along a longitudinal side of the transport chamber, the at least one load lock chamber being communicably connected to the transport chamber to allow passage of a substrate between the transport chamber and the at least one load lock chamber; at least one tool interface communicably connected to the transport chamber at one or more ends of the transport chamber to allow passage of the substrate between the transport chamber and the at least one tool interface where the at least one tool interface is in substantial alignment with the gross linear substrate transport axis such that the gross linear substrate transport axis extends into the at least one tool interface; a substrate transport located in and movably mounted to the transport chamber for transporting the substrate along the gross linear substrate transport axis, the substrate transport having at least one transporter configured to hold and move the substrate; and a substrate transport drive operably connected to the substrate transport, and having a drive motor for moving the transporter in at least two substantially orthogonal directions, the two substantially orthogonal directions respectively effecting travel along the gross linear substrate transport axis, the at least one transporter translatably interfacing a wall of the transport chamber for moving along the gross linear substrate transport axis, and the drive motor being fixedly mounted to the wall; wherein the transport chamber has a selectably variable longitudinal length between the interfaces.