发明名称 |
SUBSTRATE SUPPORT ASSEMBLY HAVING A PLASMA RESISTANT PROTECTIVE LAYER |
摘要 |
<p>A substrate support assembly comprises a ceramic body and a thermally conductive base bonded to a lower surface of the ceramic body. The substrate support assembly further comprises a protective layer covering an upper surface of the ceramic body, wherein the protective layer comprises at least one of yttrium aluminum garnet (YAG) or a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3-ZrO2.</p> |
申请公布号 |
WO2014089244(A1) |
申请公布日期 |
2014.06.12 |
申请号 |
WO2013US73192 |
申请日期 |
2013.12.04 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SUN, JENNIFER Y.;THACH, SENH;KANUNGO, BIRAJA P.;FIROUZDOR, VAHID |
分类号 |
H01L21/683;C04B35/505 |
主分类号 |
H01L21/683 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|