TRANSPARENT CONDUCTIVE GLASS SUBSTRATE WITH SURFACE ELECTRODE AND PROCESS OF MANUFACTURING THE SAME, AND THIN FILM SOLAR CELL AND PROCESS OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a transparent conductive glass substrate with a surface electrode having a low reflectance, low absorption, and high transmittance and to provide a thin film solar cell using the same, having photoelectric conversion efficiency higher than before.SOLUTION: On a translucent glass substrate, a low refractive index transparent thin film having refractive index of 1.6 to 1.8 at a wavelength of 550 nm is formed with a film thickness of 50 nm to 150 nm as a first layer, and by sequentially forming on the low refractive index transparent thin film an indium oxide based amorphous transparent conductive film as a second layer and an uneven film of a zinc oxide based crystalline transparent conductive film as a third layer, the transparent conductive glass substrate with a surface electrode is formed.