COMPACT TUNABLE PHOTONIC CRYSTAL NANOBEAM CAVITY WITH LOW POWER CONSUMPTION

摘要

Methods and devices for a tunable photonic crystal nanobeam cavity are disclosed. Such nanobeam cavity has high Q-factor and can be integrated with a microheater. The resonant wavelength of the cavity can be tuned to attain a high modulation depth with low power consumption.

主权项

1. A device comprising:
a substrate; a nanobeam cavity element on the substrate, wherein the nanobeam cavity element comprises a row of periodically spaced holes; a waveguide element on the substrate; a spacing element, separating the waveguide element from the nanobeam cavity element; a spacing layer, covering the nanobeam cavity element, the waveguide element, and the spacing element; and a heater element on the spacing layer.