| 发明名称 |
RADIATION SOURCE |
| 摘要 |
A radiation source includes a nozzle configured to direct a stream of fuel droplets along a trajectory towards a plasma formation location; a laser configured to output laser radiation, the laser radiation directed at the fuel droplets at the plasma formation location to generate, in use, a radiation generating plasma; and a catch configured to catch fuel droplets that pass the plasma formation location. The catch includes a container configured to contain a fluid; a driver configured to drive the fluid, to cause the fluid to move; the catch being configured such that the fuel droplets are incident on that moving fluid. |
| 申请公布号 |
US2014160453(A1) |
申请公布日期 |
2014.06.12 |
| 申请号 |
US201114234982 |
申请日期 |
2011.12.13 |
| 申请人 |
Kempen Antonius Theodorus Wilhelmus;Loopstra Erik Roelof;Wagner Christian;Tegenbosch Henricus Gerardus;Swinkels Gerardus Hubertus Petrus Maria |
发明人 |
Kempen Antonius Theodorus Wilhelmus;Loopstra Erik Roelof;Wagner Christian;Tegenbosch Henricus Gerardus;Swinkels Gerardus Hubertus Petrus Maria |
| 分类号 |
H05G2/00;G03F7/20 |
主分类号 |
H05G2/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A radiation source comprising:
a nozzle configured to direct a stream of fuel droplets along a trajectory towards a plasma formation location; a laser configured to output laser radiation, the laser radiation directed at the fuel droplets at the plasma formation location to generate, in use, a radiation generating plasma; and a catch arranged to catch fuel droplets that pass the plasma formation location, the catch comprising:
a container constructed to contain a fluid;a driver constructed and arranged to drive the fluid, to cause the fluid to move; the catch being configured such that, in use, the fuel droplets are incident on an inclined surface of the moving fluid.
|
| 地址 |
's-Hertogenbosch NL |
