| 摘要 |
A local air cleaner (1) is configured in such a manner that a uniform current of cleaned air discharged from an air current opening surface (23) and contacts an air contact surface (W) and flow to the outside of an open region, thereby maintaining the insides of a guide (3) and the open region at a cleanliness level higher than that of the remaining region. The local air cleaner (1) is provided with at least one of a device for measuring pressure within the guide (3) and pressure within a push hood (2), a device for measuring the level of cleanliness in the guide (3) or the open region, or a device for measuring the gap between the guide (3) and the air contact surface (W). In order to ensure the level of cleanliness, the local air cleaner (1) controls the flow speed of a uniform current of cleaned air discharged from the air current opening surface (23), the control being performed on the basis of the measurement result in such a manner that the flow speed can be accelerated or decelerated. |
