| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical solution coating device, a chemical solution coating unit and a chemical solution coating method, being wide in an applicable viscosity region of a chemical solution, and being excellent in use efficiency of the chemical solution.SOLUTION: A carrying mechanism 20 carries a holding body 93 of already forming a layer of an adhesive along the horizontal direction by sending out from a feed roller 21. A base material sheet is supplied and stuck at a constant interval to an upper surface of the carried holding body 93. The chemical solution including a chemical is fed to a discharge part 10 from a chemical solution supply part 30. The discharge part 10 is moved along a linear moving locus in a state of discharging the chemical solution in a columnar shape. A mechanismic pressurizing system discharge part can be adopted in this system, and thereby, the applicable viscosity region of the chemical solution becomes wide, and the linear moving locus is also set by a control part 80, so that the chemical solution applied to a place except for the base material sheet is reduced, and the use efficiency of the chemical can be improved. |
