| 摘要 |
PROBLEM TO BE SOLVED: To provide a peeling device, a peeling system, and a peeling method, for further efficiency of peeling process.SOLUTION: A peeling device of the embodiment includes: a first holding part; a second holding part; and a peeling induction part. The first holding part holds a first substrate of a layered substrate in which a first substrate and a second substrate are jointed. The second holding part holds the second substrate of the layered substrate, and moves the second substrate in a direction away from the plate face of the first substrate. The peeling induction part forms on the side face of the layered substrate a part that serves as a starting point for peeling off the second substrate from the first substrate. In addition, the peeling induction part includes a sharp material and a movement mechanism that moves the sharp material toward the side face in the second substrate which is closer to a joint part connecting the first and the second substrates, of the side faces of the layered substrate. |
