| 发明名称 |
Methods and Apparatus for Transfer of Films Among Substrates |
| 摘要 |
A method is disclosed which includes: forming at least one layer of material on at least part of a surface of a first substrate, wherein a first surface of the at least one layer of material is in contact with the first substrate thereby defining an interface; attaching a second substrate to a second surface of the at least one layer of material; forming bubbles at the interface; and applying mechanical force; whereby the second substrate and the at least one layer of material are jointly separated from the first substrate. Related arrangements are also described. |
| 申请公布号 |
US2014162433(A1) |
申请公布日期 |
2014.06.12 |
| 申请号 |
US201314099032 |
申请日期 |
2013.12.06 |
| 申请人 |
Graphene Frontiers |
发明人 |
Willner Bruce Ira |
| 分类号 |
H01L21/02;H01L21/67 |
主分类号 |
H01L21/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method comprising:
forming at least one layer of material on at least part of a surface of a first substrate, wherein a first surface of the at least one layer of material is in contact with the first substrate thereby defining an interface; attaching a second substrate to a second surface of the at least one layer of material; forming bubbles at the interface; and applying mechanical force; whereby the second substrate and the at least one layer of material are jointly separated from the first substrate.
|
| 地址 |
Philadelphia PA US |
