| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus, a substrate processing method, and a storage media, capable of reliably understanding the substrate holding state by means of a clamp by adjusting the posture of a charge-coupled device camera.SOLUTION: A substrate processing apparatus 1 includes: a substrate processing chamber 14: a substrate holding device 30 for holding a substrate W by means of a clamp 30 disposed in the substrate processing chamber 14; imaging means 25 for imaging the holding state of the substrate W by means of the clamp 30; and a pair of lights 55a and 55b for illuminating an area imaged by the imaging means 25. The imaging means 25 images a first marker M1 in the substrate processing chamber 14 and transmits the resulted image data to an image control part 70. The image control part 70 compares the image data of the first marker M1 to a preliminarily stored reference image data of the first marker M1 of which the imaging means 25 taking a correct position and a direction, thus, determining the position and the direction of the imaging means 25. |
