ORGANIC EL ELEMENT MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an organic EL element manufacturing apparatus capable of appropriately adjusting the carrier mobility in a formed deposited film.SOLUTION: A manufacturing apparatus 1 includes: a deposition unit 10 which has an evaporation source unit 3 for evaporating a vapor deposition material 32; a substrate temperature control mechanism for heating or cooling a substrate 2. An evaporation source unit 3 is filled with a carrier transport material for forming a carrier transport layer. The substrate temperature control mechanism includes: a storage 52 storing a piece of correlation data between the substrate temperature and the carrier mobility when forming the carrier transport layer; an input section 51 for inputting a desired carrier mobility; a calculation section (control unit 53) that calculates the substrate forming temperature based on the correlation data and the input carrier mobility. When forming the carrier transport layer, the substrate 2 is heated or cooled so that the substrate 2 is maintained at the calculated substrate temperature. With this arrangement, the carrier mobility of the formed deposited film can be adjusted by controlling the temperature of the substrate 2.