发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE HAVING AN UNDULATING REFLECTIVE SURFACE OF AN ELECTRODE
摘要 A method for manufacturing a semiconductor device includes providing a substrate and a back electrode disposed between the substrate and an active semiconductor layer. The back electrode has a reflective layer that is reflective to at least one wavelength of light and includes a reflective surface having an undulating profile that includes peaks and valleys. The method includes depositing a filler layer onto the reflective layer of the back electrode. The filler layer at least partially fills one or more of the valleys of the reflective surface. The filler layer is transmissive to the at least one wavelength of light such that the at least one wavelength of light can pass through the filler layer to the reflective layer. The method includes depositing the active semiconductor layer onto the filler layer such that the filler layer and the back electrode are disposed between the substrate and the active semiconductor layer.
申请公布号 US2014159182(A1) 申请公布日期 2014.06.12
申请号 US201213707139 申请日期 2012.12.06
申请人 THINSILLICON CORPORATION 发明人 DANTE MARK EDWARD;COAKLEY KEVIN MICHAEL
分类号 H01L31/18;H01L31/0232 主分类号 H01L31/18
代理机构 代理人
主权项 1. A method for manufacturing a semiconductor device, the method comprising: providing a substrate and a back electrode disposed between the substrate and an active semiconductor layer, the back electrode having a reflective layer that is reflective to at least one wavelength of light, the reflective layer comprising an undulating reflective surface having an undulating profile that includes peaks that protrude away from the substrate and valleys that extend into the reflective layer toward the substrate; depositing a filler layer onto the reflective layer of the back electrode such that the active semiconductor layer can be subsequently deposited onto the filler layer, the filler layer at least partially filling one or more of the valleys of the undulating profile of the reflective surface, the filler layer being transmissive to the at least one wavelength of light such that the at least one wavelength of light can pass through the filler layer to the reflective layer of the back electrode; and depositing the active semiconductor layer onto the filler layer such that the filler layer and the back electrode are disposed between the substrate and the active semiconductor layer, wherein the filler layer is positioned such that at least a portion of incident light passes through the active semiconductor layer into the filler layer, passes through the filler layer, is reflected by the reflective layer of the back electrode, and passes back through the filler layer to be absorbed by the active semiconductor layer.
地址 Mountain View CA US