CHARACTERIZATION OF NANOSCALE STRUCTURES USING AN ULTRAFAST ELECTRON MICROSCOPE

摘要

The present invention relates to methods and systems for 4D ultrafast electron microscopy (UEM)—in situ imaging with ultrafast time resolution in TEM. Single electron imaging is used as a component of the 4D UEM technique to provide high spatial and temporal resolution unavailable using conventional techniques. Other embodiments of the present invention relate to methods and systems for convergent beam UEM, focusing the electron beams onto the specimen to measure structural characteristics in three dimensions as a function of time. Additionally, embodiments provide not only 4D imaging of specimens, but characterization of electron energy, performing time resolved electron energy loss spectroscopy (EELS).

主权项

1. A system for imaging a sample, the system comprising:
a stage assembly disposed in a chamber and adapted to receive a sample to be imaged; a cathode operable to emit an electron pulse; a lens assembly operable to direct the electron pulse to impinge on the sample disposed on the stage assembly; and a detector operable to capture the electron pulse passing through the sample.