发明名称 |
ION BEAM SAMPLE PREPARATION APPARATUS AND METHODS |
摘要 |
Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The methods operate on a sample disposed in a vacuum chamber and include steps of directing an intensity-controllable, tilt-angle controllable ion beam at a sample holder coupled to a rotation stage. The methods further include illuminating and capturing one or more images of the sample, extracting useful features from one or more images and thereafter adjusting the sample preparation steps. Further methods are disclosed for capturing sequences of images, programmatically rotating images, and displaying sequences of images with similar rotation angles. Further methods include extracting useful features from sequences of images that may change with respect to time as ion beam preparation continues |
申请公布号 |
WO2014018694(A3) |
申请公布日期 |
2014.06.12 |
申请号 |
WO2013US51917 |
申请日期 |
2013.07.25 |
申请人 |
GATAN, INC. |
发明人 |
HUNT, JOHN ANDREW;COYLE, STEVEN THOMAS;HASSEL-SHEARER, MICHAEL |
分类号 |
H01L21/66;G01N1/32;H01J37/305 |
主分类号 |
H01L21/66 |
代理机构 |
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