MEASUREMENT MICROSCOPE DEVICE, IMAGE GENERATION METHOD, MEASUREMENT MICROSCOPE DEVICE OPERATION PROGRAM AND COMPUTER READABLE RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To enable an image of a wide field of view to be captured without reducing measurement accuracy.SOLUTION: A measurement microscope device comprises: a stage for mounting an object thereon; display means for displaying a height image or an observation image; measurement means for performing a measurement to the height image displayed on the display means; image connection means that acquires a plurality of height images intended for a connection and a plurality of observation images intended for the connection by moving the stage and photographing a different area including a margin for connection, interconnects the acquired plurality of height images intended for the connection and the acquired plurality of observation images intended for the connection and can generate a connection image; measurement abnormality area display means that can overlap and display a measurement abnormality area in which a measurement result in height is abnormal on an image of an object corresponding to each area to be connected by the image connection means; and measurement image photographing condition setting means for adjusting a photographing condition of a fringe image required for generation of the height image so as to reduce the measurement abnormality area with the measurement abnormality area displayed.