MEMS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technology that can improve thermal behavior in a MEMS device in which a movable part is formed by removing selectively a sacrificial layer layered between a first layer and a second layer substantially made of a same material.SOLUTION: In a MEMS device in which a movable part is formed by removing selectively a sacrificial layer layered between a first layer and a second layer substantially made of a same material, the movable part has a connection part where the first layer and the second layer are connected physically by an interlamellar connection part filling mainly between the first layer and the second layer. In the MEMS device, a coefficient of linear expansion of a material constituting the interlamellar connection part is approximate to a coefficient of linear expansion of the material constituting the first layer and the second layer in comparison with a coefficient of linear expansion of the material constituting the sacrificial layer.