METHOD AND SYSTEM FOR LOCALLY CONTROLLING SUPPORT OF A FLAT OBJECT

摘要

A non-contact support platform system is provided for supporting a substantially flat object. The system includes a platform with a first plurality of pressure ports and a first plurality of vacuum ports for inducing a fluid cushion to support the object at a distance from the platform. The system further includes a second plurality of pressure ports located at a predetermined zone of the platform for increasing the distance of the object from the platform at the predetermined zone.

主权项

1. A non-contact support platform system for supporting a substantially flat object, the system comprising:
a first platform with a first plurality of pressure ports in the form of nozzles with flow restricting fins interspersed with a first plurality of vacuum ports for inducing a bi-directionally stiff fluid cushion to support the object at a substantially fixed distance from the first platform, the first platform including a second plurality of pressure ports located at an edge zone of the first platform to apply pressure forces to increase a distance between a section of the object and the first platform at the edge zone; and a second platform that includes pressure ports in the form of nozzles with flow restricting fins interspersed with vacuum ports for inducing a bi-directionally stiff fluid cushion to support the object at a substantially fixed distance from the second platform, the second platform being separated from the first platform by a gap, such that the object is conveyable across the gap from the first platform to the second platform when the pressure forces are applied by the second plurality of the pressure ports to the section of the object.