HIGH DENSITY SERIAL CAPACITOR DEVICE AND METHODS OF MAKING SUCH A CAPACITOR DEVICE

摘要

A serial capacitor comprised of a bottom electrode, a top electrode that is conductively coupled the bottom electrode, a middle electrode positioned between the bottom and top electrode, a lower dielectric layer positioned between the bottom and middle electrodes, and an upper dielectric layer positioned between the middle and the electrodes. A method includes forming the bottom electrode in a first layer of insulating material, forming the lower dielectric layer and the middle electrode above the bottom electrode, wherein the middle electrode is positioned in a second layer of insulating material, forming the upper dielectric layer above the middle electrode, forming an opening that exposes a portion of the bottom electrode, and forming the top electrode above the upper dielectric layer, wherein a portion of the top electrode extends through the opening and contacts the bottom electrode.

主权项

1. A capacitor, comprising:
a bottom electrode; a top electrode positioned above said bottom electrode, said top electrode and said bottom electrode being conductively coupled to one another; a middle electrode positioned between said bottom electrode and said top electrode; a lower dielectric layer positioned between said bottom electrode and said middle electrode; and an upper dielectric layer positioned between said middle electrode and said top electrode.