主权项 |
1. A semiconductor process sensor, the semiconductor process sensor comprising:
a constant reference voltage source configured to generate a constant reference voltage signal; and a process sensor element coupled to the constant reference voltage source and configured to receive the constant reference voltage signal, sense a process parameter indicative of a semiconductor process by which the semiconductor process sensor was formed, and generate, based upon the sensed process parameter, a process measurement signal that characterizes the semiconductor process by which the semiconductor process sensor was formed as one of nominal, above-nominal, or below-nominal.
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